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    您所在的位置 >  首页 >  工业检测设备 > 非接触式测量仪器 > 自动影像仪 > Nikon VMZ 系列自动影像仪

    VMZ-K3040 & VMZ-K6555 共轭焦影像测量系统

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    产品名称:VMZ-K3040 & VMZ-K6555 共轭焦影像测量系统

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    Nikon VMZ-K3040 & VMZ-K6555 共轭焦影像测量系统

    Simultaneous wide-area height measurements with confocal optics and 2D measurement with 15× bright?eld zoom optics.


    VMZ-K3040

    VMZ-K6555

    XY Stroke (mm)

    300×400

    650×550

    Magni?cation (Type S)

    1.5× / 3× / 7.5×

    1.5× / 3× / 7.5×

    Magni?cation (Type H)

    15× / 30×

    15× / 30×

    Z-axis Stroke (mm)

    150

    150

    Max. guaranteed loading capacity (kg)

    20

    30

    Max. permissible error U1X, U1Y (μm)

    1.5+2.5L / 1000

    1.5+2.5L / 1000

    Max. permissible error of Z axis (μm)

    1+L / 1000

    1+L / 1000























    Zoom Heads

    Confocal NEXIV incorporates confocal optics for fast and accurate evaluation of ?ne three-dimensional geometries.

    Confocal Optics are designed for wide FOV height measurement.
    • High Contrast and Multileveled Sample (PCBs)

    Bright?eld observation can sometimes be dif?cult due to blurred lines along sample structure. These lines can be clearly observed and measured using Confocal optics. 

    • Thin Transparent Samples (Metal Surface Film / Semiconductor Resist)

    Top layers of both thin transparent ?lm and metal surface can be easily detected using Confocal optics.


    电   话: 010-62553066
    010-62565779(总机)

    传   真: 010-62566652

    测量部:400-172-5117

    测定部:400-820-5501

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